纳米Fe2O3 MOS厚膜乙醇气体传感器的研究

G. Jain, N. K. Pawar
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引用次数: 0

摘要

制备了具有n型半导体性能的AR级纳米Fe2O3材料厚膜,并对其气敏性能进行了测试。采用丝网印刷技术制备了材料的厚膜。采用静态气敏系统对其气敏性能进行了研究。测试了该材料的各种气体,如CO, CO2, NH3, Cl2, H2, LPG,乙醇和H2S。制备的纳米Fe2O3薄膜对温度为350℃、浓度为250 ppm的乙醇气体最敏感,且响应时间短、回收时间长。采用透射电镜、x射线衍射仪研究了薄膜材料的物理和结构性能。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Study of nano Fe2O3 MOS thick films as ethanol gas sensor
Thick films of AR Grade nano Fe2O3 material with n type semiconducting properties were prepared and tested for their gas sensing performances. Thick films of the materials were prepared by screen printing technique. The gas sensing performance was studied using static gas sensing system. The material was tested for various gases such as CO, CO2, NH3, Cl2, H2, LPG, ethanol and H2S. The nano Fe2O3 film showed maximum sensitivity to Ethanol gas at 350°C temperature and at 250 ppm concentration with short response time and large recovery time. Physical and structural properties of the films material were studied by TEM, XRD.
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