{"title":"纳米Fe2O3 MOS厚膜乙醇气体传感器的研究","authors":"G. Jain, N. K. Pawar","doi":"10.1109/ICSENST.2011.6136944","DOIUrl":null,"url":null,"abstract":"Thick films of AR Grade nano Fe<inf>2</inf>O<inf>3</inf> material with n type semiconducting properties were prepared and tested for their gas sensing performances. Thick films of the materials were prepared by screen printing technique. The gas sensing performance was studied using static gas sensing system. The material was tested for various gases such as CO, CO<inf>2</inf>, NH<inf>3</inf>, Cl<inf>2</inf>, H<inf>2</inf>, LPG, ethanol and H<inf>2</inf>S. The nano Fe<inf>2</inf>O<inf>3</inf> film showed maximum sensitivity to Ethanol gas at 350°C temperature and at 250 ppm concentration with short response time and large recovery time. Physical and structural properties of the films material were studied by TEM, XRD.","PeriodicalId":202062,"journal":{"name":"2011 Fifth International Conference on Sensing Technology","volume":"20 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2011-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Study of nano Fe2O3 MOS thick films as ethanol gas sensor\",\"authors\":\"G. Jain, N. K. Pawar\",\"doi\":\"10.1109/ICSENST.2011.6136944\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Thick films of AR Grade nano Fe<inf>2</inf>O<inf>3</inf> material with n type semiconducting properties were prepared and tested for their gas sensing performances. Thick films of the materials were prepared by screen printing technique. The gas sensing performance was studied using static gas sensing system. The material was tested for various gases such as CO, CO<inf>2</inf>, NH<inf>3</inf>, Cl<inf>2</inf>, H<inf>2</inf>, LPG, ethanol and H<inf>2</inf>S. The nano Fe<inf>2</inf>O<inf>3</inf> film showed maximum sensitivity to Ethanol gas at 350°C temperature and at 250 ppm concentration with short response time and large recovery time. Physical and structural properties of the films material were studied by TEM, XRD.\",\"PeriodicalId\":202062,\"journal\":{\"name\":\"2011 Fifth International Conference on Sensing Technology\",\"volume\":\"20 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2011-11-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2011 Fifth International Conference on Sensing Technology\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICSENST.2011.6136944\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2011 Fifth International Conference on Sensing Technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSENST.2011.6136944","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Study of nano Fe2O3 MOS thick films as ethanol gas sensor
Thick films of AR Grade nano Fe2O3 material with n type semiconducting properties were prepared and tested for their gas sensing performances. Thick films of the materials were prepared by screen printing technique. The gas sensing performance was studied using static gas sensing system. The material was tested for various gases such as CO, CO2, NH3, Cl2, H2, LPG, ethanol and H2S. The nano Fe2O3 film showed maximum sensitivity to Ethanol gas at 350°C temperature and at 250 ppm concentration with short response time and large recovery time. Physical and structural properties of the films material were studied by TEM, XRD.