超大规模集成电路中试线的统计过程控制与六西格玛驱动

Proceedings of 15th IEEE/CHMT International Electronic Manufacturing Technology Symposium Pub Date : 1993-10-04 DOI:10.1109/IEMT.1993.398199

P. Nixon, J. Conway, J. Maimon

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引用次数: 3

摘要

半导体器件制造和国防工业的需求不断要求更严格的过程控制和降低缺陷水平。统计过程控制(SPC)技术需要满足这些要求。VLSI中试线在生产过程中对所有产品实行SPC控制。在线图表用于尽快识别和纠正问题，能力指数用于推动持续改进。

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Statistical process control and the drive for six sigma in a VLSI pilot line

The requirements of semiconductor device manufacturing and defense industry needs are continually demanding tighter process control and reduced levels of defects. Statistical process control (SPC) techniques are required to meet these requirements. The VLSI pilot line has implemented SPC control in manufacturing on all products. Online charts are used to identify and correct problems as quickly as possible and capability indices are used to drive continuous improvement.<>

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Proceedings of 15th IEEE/CHMT International Electronic Manufacturing Technology Symposium

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