Effect of temperature on optical properties of CeOX film being irradiated by Co60 prepared by RF magnetron sputtering

The windows for the aerospace ship application is consist of fused silica and optical-films which can resist the ray-irradiation among the cosmos. For the optical-films produced by RF magnetron sputtering, the ray-irradiation anti-resist character is related with the sputtering temperature and the annealing temperature. As one of the high refractive index materials for the optical-design of the multi-layer optical film, CeOx film were exposed to Co60 irradiation of 107 、108 、and109rad(Si) respectively. The spectrum- transmission line showed the optical character before and after the irradiation. Due to the decreasing of the defect among the film with the raising of the temperature ,the higher the sputtering and annealing temperature, the well anti-irradiation character. The transform of the Ce3+ and Ce4+ is beneficial for the optical character while the E’ center can be moved from the visible-band to the ultraviolet band. But with the raising of the irradiation does, the micro-structure is key for the anti-irradiation character of the CeOx film.