A. T. A. D. De Silva, D. D. De Silva, K. D. C. J. Perera, A. M. B. Priyashantha, L. L. Ruwan Sampath, P. Darshan, W. Jayathilaka, Y. Amarasinghe
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It is essential for the Micro Electro Mechanical Systems (MEMS) research industry to introduce novel concepts of micro motors to overcome problems in existing micro motors. This paper propose a novel concept of a micro motor using kink actuators and reciprocating rack and pinion assembly. Design details of the reciprocating rack and pinion is discussed in the paper. A detailed analysis of structural, transient, thermal, electrical properties was performed using the COMSOL software is also discussed. Finally a fabrication method is purposed using electron beam lithography and ultraviolet lithography.
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