{"title":"半导体制造过程仿真模型选择的多准则决策方法","authors":"Gonca Altuger-Genc, Lucy Tzitzimititla","doi":"10.1109/LISAT.2015.7160199","DOIUrl":null,"url":null,"abstract":"This study examines the manufacturing portion of the semiconductor supply chain, and presents three different models to analyze the manufacturing process. The models have different levels of complexity, detail and features. The best-fitting modeling approach is selected using a multi criteria decision-making process.","PeriodicalId":235333,"journal":{"name":"2015 Long Island Systems, Applications and Technology","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2015-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A multi criteria decision making approach to model selection for semiconductor manufacturing process simulation\",\"authors\":\"Gonca Altuger-Genc, Lucy Tzitzimititla\",\"doi\":\"10.1109/LISAT.2015.7160199\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This study examines the manufacturing portion of the semiconductor supply chain, and presents three different models to analyze the manufacturing process. The models have different levels of complexity, detail and features. The best-fitting modeling approach is selected using a multi criteria decision-making process.\",\"PeriodicalId\":235333,\"journal\":{\"name\":\"2015 Long Island Systems, Applications and Technology\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2015-05-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2015 Long Island Systems, Applications and Technology\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/LISAT.2015.7160199\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 Long Island Systems, Applications and Technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/LISAT.2015.7160199","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A multi criteria decision making approach to model selection for semiconductor manufacturing process simulation
This study examines the manufacturing portion of the semiconductor supply chain, and presents three different models to analyze the manufacturing process. The models have different levels of complexity, detail and features. The best-fitting modeling approach is selected using a multi criteria decision-making process.