从器件PN结外围流过半导体-介电界面的反向漏电流所引起的热点

V. Obreja, A. Obreja, K. Nuttall
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引用次数: 1

摘要

采用工业功率硅二极管芯片设计了红外成像显微镜实验。在220℃的温度下,在500 V的反向电压下,结周附近出现了热点。这些热点是由结周边不均匀的漏电流引起的。在较高的施加电压下,这些小的过热区域会引发反向电特性不稳定,随后发生故障。为了提供高质量的半导体-介电界面,需要从器件技术上进一步改进结钝化工艺。这可以使一些功率硅器件在200°C结温以上可靠地工作。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Hot spots induced by reverse leakage current flow through the semiconductor-dielectric interface from device PN junction periphery
A commercial power silicon diode die was used in a suitable devised experiment with infrared imaging microscope. At 500 V applied reverse voltage, hot spots have been revealed near the junction periphery at 220 °C temperature. These hot spots are attributed to non-uniform leakage current flow at the junction periphery. At higher applied voltage these small overheated regions can initiate reverse electrical characteristic instability followed by failure. Further advance in the junction passivation process from device technology is required to provide high quality semiconductor-dielectric interface. This could enable reliable operation of some power silicon devices above 200°C junction temperature.
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