{"title":"基于光散射的表面缺陷检测与分类","authors":"M. Gebhardt, H. Truckenbrodt, B. Harnisch","doi":"10.1117/12.46822","DOIUrl":null,"url":null,"abstract":"The quality of smooth technical surfaces is characterized by the surface roughness and by surface defects. For a stable quality control, objective measuring conditions are necessary. The objective measurement of surface defects especially is an unsolved problem. For the investigation of the scattering characteristics of different surface defects, a measuring device was developed. With this measuring device, the type of defect and the angle dependent scattering intensity were measured and compared with theoretical calculations.","PeriodicalId":198425,"journal":{"name":"Other Conferences","volume":"40 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1991-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":"{\"title\":\"Surface defect detection and classification with light scattering\",\"authors\":\"M. Gebhardt, H. Truckenbrodt, B. Harnisch\",\"doi\":\"10.1117/12.46822\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The quality of smooth technical surfaces is characterized by the surface roughness and by surface defects. For a stable quality control, objective measuring conditions are necessary. The objective measurement of surface defects especially is an unsolved problem. For the investigation of the scattering characteristics of different surface defects, a measuring device was developed. With this measuring device, the type of defect and the angle dependent scattering intensity were measured and compared with theoretical calculations.\",\"PeriodicalId\":198425,\"journal\":{\"name\":\"Other Conferences\",\"volume\":\"40 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1991-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"5\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Other Conferences\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.46822\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Other Conferences","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.46822","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Surface defect detection and classification with light scattering
The quality of smooth technical surfaces is characterized by the surface roughness and by surface defects. For a stable quality control, objective measuring conditions are necessary. The objective measurement of surface defects especially is an unsolved problem. For the investigation of the scattering characteristics of different surface defects, a measuring device was developed. With this measuring device, the type of defect and the angle dependent scattering intensity were measured and compared with theoretical calculations.
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