热气体传感器微加工测试结构

2016 International Conference on Microelectronic Test Structures (ICMTS) Pub Date : 2016-03-28 DOI:10.1109/ICMTS.2016.7476165

M. Denoual, M. Pouliquen, D. Robbes, J. Grand, H. Awala, S. Mintova, O. de Sagazan, S. Inoue, A. Mita-Tixier, Y. Mita

{"title":"热气体传感器微加工测试结构","authors":"M. Denoual, M. Pouliquen, D. Robbes, J. Grand, H. Awala, S. Mintova, O. de Sagazan, S. Inoue, A. Mita-Tixier, Y. Mita","doi":"10.1109/ICMTS.2016.7476165","DOIUrl":null,"url":null,"abstract":"Microfabricated test structures are presented for the proof validation of a new chemical sensor concept. The proposed detection principle is based on time constant shift of a thermal device covered with zeolites when target species are adsorbed.","PeriodicalId":344487,"journal":{"name":"2016 International Conference on Microelectronic Test Structures (ICMTS)","volume":"30 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-03-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Microfabricated test structures for thermal gas sensor\",\"authors\":\"M. Denoual, M. Pouliquen, D. Robbes, J. Grand, H. Awala, S. Mintova, O. de Sagazan, S. Inoue, A. Mita-Tixier, Y. Mita\",\"doi\":\"10.1109/ICMTS.2016.7476165\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Microfabricated test structures are presented for the proof validation of a new chemical sensor concept. The proposed detection principle is based on time constant shift of a thermal device covered with zeolites when target species are adsorbed.\",\"PeriodicalId\":344487,\"journal\":{\"name\":\"2016 International Conference on Microelectronic Test Structures (ICMTS)\",\"volume\":\"30 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2016-03-28\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2016 International Conference on Microelectronic Test Structures (ICMTS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICMTS.2016.7476165\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 International Conference on Microelectronic Test Structures (ICMTS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICMTS.2016.7476165","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 3

摘要

为验证一种新的化学传感器概念，提出了微加工测试结构。所提出的检测原理是基于沸石覆盖的热装置在吸附目标物质时的时间常数位移。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Microfabricated test structures for thermal gas sensor

Microfabricated test structures are presented for the proof validation of a new chemical sensor concept. The proposed detection principle is based on time constant shift of a thermal device covered with zeolites when target species are adsorbed.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2016 International Conference on Microelectronic Test Structures (ICMTS)

自引率

0.00%

发文量