{"title":"基于溶液加工金属氧化物半导体薄膜晶体管的动态传感器阵列","authors":"Bowen Zhu","doi":"10.1109/ICTA56932.2022.9963086","DOIUrl":null,"url":null,"abstract":"Flexible active-matrix sensor arrays provide large area and high spatial resolution for emerging sensing applications in electronic skin, health monitoring, and human-machine interfaces. However, it is still a challenge to achieve flexible active-matrix sensor arrays with low cost, low crosstalk, high sensitivity, and high uniformity characteristics. Here, we demonstrate a low-cost, high-resolution flexible sensor array by integrating solution-processed indium oxide (In2O3) transistor array with stimuli-sensitive (force, light, etc.) layers. This strategy provides an effective and universal solution to achieve large-area, active-matrix sensor arrays for future soft electronics applications.","PeriodicalId":325602,"journal":{"name":"2022 IEEE International Conference on Integrated Circuits, Technologies and Applications (ICTA)","volume":"34 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-10-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Dynamic Sensor Arrays Based on Solution-Processed Metal Oxide Semiconductor Thin-Film Transistors\",\"authors\":\"Bowen Zhu\",\"doi\":\"10.1109/ICTA56932.2022.9963086\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Flexible active-matrix sensor arrays provide large area and high spatial resolution for emerging sensing applications in electronic skin, health monitoring, and human-machine interfaces. However, it is still a challenge to achieve flexible active-matrix sensor arrays with low cost, low crosstalk, high sensitivity, and high uniformity characteristics. Here, we demonstrate a low-cost, high-resolution flexible sensor array by integrating solution-processed indium oxide (In2O3) transistor array with stimuli-sensitive (force, light, etc.) layers. This strategy provides an effective and universal solution to achieve large-area, active-matrix sensor arrays for future soft electronics applications.\",\"PeriodicalId\":325602,\"journal\":{\"name\":\"2022 IEEE International Conference on Integrated Circuits, Technologies and Applications (ICTA)\",\"volume\":\"34 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-10-28\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2022 IEEE International Conference on Integrated Circuits, Technologies and Applications (ICTA)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICTA56932.2022.9963086\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2022 IEEE International Conference on Integrated Circuits, Technologies and Applications (ICTA)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICTA56932.2022.9963086","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Dynamic Sensor Arrays Based on Solution-Processed Metal Oxide Semiconductor Thin-Film Transistors
Flexible active-matrix sensor arrays provide large area and high spatial resolution for emerging sensing applications in electronic skin, health monitoring, and human-machine interfaces. However, it is still a challenge to achieve flexible active-matrix sensor arrays with low cost, low crosstalk, high sensitivity, and high uniformity characteristics. Here, we demonstrate a low-cost, high-resolution flexible sensor array by integrating solution-processed indium oxide (In2O3) transistor array with stimuli-sensitive (force, light, etc.) layers. This strategy provides an effective and universal solution to achieve large-area, active-matrix sensor arrays for future soft electronics applications.