基于溶液加工金属氧化物半导体薄膜晶体管的动态传感器阵列

Bowen Zhu
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引用次数: 0

摘要

灵活的有源矩阵传感器阵列为电子皮肤、健康监测和人机界面等新兴传感应用提供了大面积和高空间分辨率。然而,实现具有低成本、低串扰、高灵敏度和高均匀性的柔性有源矩阵传感器阵列仍然是一个挑战。在这里,我们展示了一种低成本,高分辨率的柔性传感器阵列,通过集成溶液处理的氧化铟(In2O3)晶体管阵列和刺激敏感层(力,光等)。该策略为实现未来软电子应用的大面积有源矩阵传感器阵列提供了有效且通用的解决方案。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Dynamic Sensor Arrays Based on Solution-Processed Metal Oxide Semiconductor Thin-Film Transistors
Flexible active-matrix sensor arrays provide large area and high spatial resolution for emerging sensing applications in electronic skin, health monitoring, and human-machine interfaces. However, it is still a challenge to achieve flexible active-matrix sensor arrays with low cost, low crosstalk, high sensitivity, and high uniformity characteristics. Here, we demonstrate a low-cost, high-resolution flexible sensor array by integrating solution-processed indium oxide (In2O3) transistor array with stimuli-sensitive (force, light, etc.) layers. This strategy provides an effective and universal solution to achieve large-area, active-matrix sensor arrays for future soft electronics applications.
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