{"title":"基于谐波相位迭代法和波长扫描干涉术的空白掩模厚度和表面轮廓分析","authors":"Sung Tae Kim, Yangjin Kim","doi":"10.1117/12.2620188","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":418389,"journal":{"name":"Optics and Photonics for Advanced Dimensional Metrology II","volume":"67 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-05-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Simultaneous thickness and surface profiling of blank mask using harmonic phase-iterative method and wavelength-scanning interferometry\",\"authors\":\"Sung Tae Kim, Yangjin Kim\",\"doi\":\"10.1117/12.2620188\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":418389,\"journal\":{\"name\":\"Optics and Photonics for Advanced Dimensional Metrology II\",\"volume\":\"67 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-05-23\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Optics and Photonics for Advanced Dimensional Metrology II\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2620188\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optics and Photonics for Advanced Dimensional Metrology II","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2620188","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}