非平面介质2 1/2D寄生提取的通用建模

Fifth International Workshop on System-on-Chip for Real-Time Applications (IWSOC'05) Pub Date : 2005-07-20 DOI:10.1109/IWSOC.2005.68

N. Kurt-Karsilayan

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引用次数: 1

摘要

讨论了非平面介质在2 1/2D寄生提取中的通用建模。首先，定义了基本的非平面介质几何类型。结果表明，基于重叠规则的复杂形状建模可以简化大多数场求解器的建模。最后，介绍了一种基于重叠假设的新算法，并基于一种现实的技术说明了非平面介质建模对精度的影响。这种方法已经在各种技术以及2.1 / 2d提取工具中进行了产品化和验证。

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Generic modeling of nonplanar dielectrics for 2 1/2D parasitic extraction

Generic modeling of nonplanar dielectrics for 2 1/2D parasitic extraction is addressed. First, basic nonplanar dielectric geometry types are defined. Then it is shown that modeling complex shapes can be simplified based on the overlapping rules for most field solvers. Finally, a novel algorithm based on the overlapping assumption is introduced and the accuracy impact of modeling nonplanar dielectrics is shown based on a realistic technology. This approach is already productized and verified against various technologies along with a 2 1/2D extraction tool.

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Fifth International Workshop on System-on-Chip for Real-Time Applications (IWSOC'05)

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