光子晶体表面发射激光器的分子束外延制备方法

2022 Compound Semiconductor Week (CSW) Pub Date : 2022-06-01 DOI:10.1109/CSW55288.2022.9930418

K. Reilly, S. Seth, F. F. Ince, A. Kalapala, T. Rotter, Zhongue Liu, E. Renteria, Weidong Zhou, G. Balakrishnan

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引用次数: 0

摘要

分子束外延是光子晶体表面发射激光器(PCSELs)的一种制备方法。探讨并比较了两种制备PCSEL的方法:外延再生和非再生。通过外延再生论证了光泵浦和电注入器件。

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Fabrication Methods for Photonic Crystal Surface Emitting Lasers (PCSELs) by Molecular Beam Epitaxy

Molecular Beam Epitaxy (MBE) is used for fabrication of Photonic Crystal Surface Emitting Lasers (PCSELs). Two methods of PCSEL fabrication are explored and compared: epitaxial regrowth and non-regrowth. Optically pumped and electrically injected devices are demonstrated by epitaxial regrowth.

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2022 Compound Semiconductor Week (CSW)

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