{"title":"高速空间PEALD沉积涂层的宏观一致性","authors":"E. Dickey, B. Danforth, W. Barrow","doi":"10.1364/OIC.2019.TE.4","DOIUrl":null,"url":null,"abstract":"Rotational Spatial PEALD has been used to deposit thin films on half-sphere lenses. Non-uniformity of less than ± 1% has been demonstrated for Nb2O5 deposited at 1.4 A/second, and for SiO2 deposited at 6 A/second.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"91 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Macro-Conformality of Coatings Deposited using High Speed Spatial PEALD\",\"authors\":\"E. Dickey, B. Danforth, W. Barrow\",\"doi\":\"10.1364/OIC.2019.TE.4\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Rotational Spatial PEALD has been used to deposit thin films on half-sphere lenses. Non-uniformity of less than ± 1% has been demonstrated for Nb2O5 deposited at 1.4 A/second, and for SiO2 deposited at 6 A/second.\",\"PeriodicalId\":119323,\"journal\":{\"name\":\"Optical Interference Coatings Conference (OIC) 2019\",\"volume\":\"91 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-06-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Optical Interference Coatings Conference (OIC) 2019\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1364/OIC.2019.TE.4\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Interference Coatings Conference (OIC) 2019","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/OIC.2019.TE.4","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Macro-Conformality of Coatings Deposited using High Speed Spatial PEALD
Rotational Spatial PEALD has been used to deposit thin films on half-sphere lenses. Non-uniformity of less than ± 1% has been demonstrated for Nb2O5 deposited at 1.4 A/second, and for SiO2 deposited at 6 A/second.
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
