在λ = 1.3µm ~ 1.6µm的SiO2上制备SOI槽光子晶体

2015 Opto-Electronics and Communications Conference (OECC) Pub Date : 2015-12-03 DOI:10.1109/OECC.2015.7340161

T. Hoang, Weiwei Zhang, S. Serna, C. Caer, X. Le roux, L. Vivien, E. Cassan

{"title":"在λ = 1.3µm ~ 1.6µm的SiO2上制备SOI槽光子晶体","authors":"T. Hoang, Weiwei Zhang, S. Serna, C. Caer, X. Le roux, L. Vivien, E. Cassan","doi":"10.1109/OECC.2015.7340161","DOIUrl":null,"url":null,"abstract":"Slot photonic crystal cavities are of great interest for their advantages of small footprint as well as pretty high quality factors and large (Q/V) factors. A series of slot photonic crystal heterostructure cavities with resonant wavelengths in the range 1.3 μm - 1.6 μm has been designed and fabricated with Q of tens of 10000 and (Q/V) reaching 800 000. These works open perspectives for on-chip nonlinear optics and biosensing.","PeriodicalId":312790,"journal":{"name":"2015 Opto-Electronics and Communications Conference (OECC)","volume":"58 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-12-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"SOI slot photonic crystal cavities on SiO2 from λ = 1.3 µm to 1.6 µm\",\"authors\":\"T. Hoang, Weiwei Zhang, S. Serna, C. Caer, X. Le roux, L. Vivien, E. Cassan\",\"doi\":\"10.1109/OECC.2015.7340161\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Slot photonic crystal cavities are of great interest for their advantages of small footprint as well as pretty high quality factors and large (Q/V) factors. A series of slot photonic crystal heterostructure cavities with resonant wavelengths in the range 1.3 μm - 1.6 μm has been designed and fabricated with Q of tens of 10000 and (Q/V) reaching 800 000. These works open perspectives for on-chip nonlinear optics and biosensing.\",\"PeriodicalId\":312790,\"journal\":{\"name\":\"2015 Opto-Electronics and Communications Conference (OECC)\",\"volume\":\"58 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2015-12-03\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2015 Opto-Electronics and Communications Conference (OECC)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OECC.2015.7340161\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 Opto-Electronics and Communications Conference (OECC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OECC.2015.7340161","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

槽型光子晶体腔因其占地面积小、质量因数高、Q/V因数大等优点而备受关注。设计并制备了一系列谐振波长在1.3 ~ 1.6 μm范围内的槽型光子晶体异质结构腔，其Q值可达数万倍，Q/V可达80万。这些工作为片上非线性光学和生物传感开辟了新的前景。

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SOI slot photonic crystal cavities on SiO2 from λ = 1.3 µm to 1.6 µm

Slot photonic crystal cavities are of great interest for their advantages of small footprint as well as pretty high quality factors and large (Q/V) factors. A series of slot photonic crystal heterostructure cavities with resonant wavelengths in the range 1.3 μm - 1.6 μm has been designed and fabricated with Q of tens of 10000 and (Q/V) reaching 800 000. These works open perspectives for on-chip nonlinear optics and biosensing.

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2015 Opto-Electronics and Communications Conference (OECC)

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