Ti2NiCU合金纳米复合材料的形状记忆效应

2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) Pub Date : 2016-07-01 DOI:10.1109/3M-NANO.2016.7824971

A. Irzhak, N. Tabachkova, D. A. Dikan, N. Sitnikov, A. Shelyakov, V. Koledov, P. Lega, V. Shavrov, A. Mashirov, S. von Gratowski, A. Zhikharev, V. Y. Pokrovsky, S. Y. Zibtsev, D. Zakharov, P. Mazaev, M. Berezin, N. Kasyanov, G. Martynov, A. Orlov

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引用次数: 1

摘要

热弹性马氏体相变合金的形状记忆效应(SME)为制造NEMS / MEMS技术的微型机械器件提供了独特的可能性。在FIB CVD技术制备的由Ti2NiCu合金层与SME和铂弹性层组成的层状复合微结构中，SME在活性层厚度减小至少80 nm时被观察到。本文从物理和工艺上考察了SME表现的最小活性层厚度的限制条件。

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The shape memory effect in nanoscale composites based on Ti2NiCU alloy

The shape memory effect (SME) in alloys with thermoelastic martensitic transformation provides a unique possibility to create the tiny mechanical devices for NEMS / MEMS technology. SME observed in layered composite microstructors produced by FIB CVD technology, consisting of Ti2NiCu alloy layer with SME and platinum elastic layer at reducing the thickness of the active layer for at least 80 nm. In this paper the physical and technological restrictions were experimentally examined on the minimum thickness of the active layer of the composites for SME manifestation.

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2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)

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