D. Howe, M. Falmbigl, J. George, K. Godin, B. Rubin
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Process Refinements in Optical Coatings for UV Applications Using Ion Beam Sputtering
We investigate how target selection, ion beam parameters, and post-deposition annealing can affect UV performance of ion beam sputtered optical coatings. We combine these considerations to produce high performance HR mirrors at 355 nm.
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