辐照In/sub 0.53/Ga/sub 0.47/As PIN光电二极管降解和恢复的辐射源依赖性

H. Ohyama, E. Simoen, C. Claeys, Y. Takami, T. Kudou, H. Sunaga
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引用次数: 2

摘要

研究了in /sub 0.53/Ga/sub 0.47/As PIN光电二极管在20 mev α射线照射下的热退火损伤及其恢复行为。二极管的电学和光学性能的退化随着影响的增加而增加。在In/sub 0.53/Ga/sub 0.47/As外延层中,辐照诱导了空穴和电子捕获能级。然后通过与1-MeV电子和1-MeV快中子的碰撞原子数和非电离能量损失(NIEL)的比较,讨论了辐射源对衰变和恢复的影响。在温度为75 ~ 300/spl℃的等时热退火条件下,由于辐照而退化的器件性能可以通过热退火得到恢复,并且恢复行为与辐射源有关。回收率随退火温度的升高而增加。射线的回收率与中子辐照几乎相同,而电子辐照的回收率要大得多。性能退化的辐射源依赖于晶格缺陷形成的质量差和核碰撞概率。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Radiation source dependence of degradation and recovery of irradiated In/sub 0.53/Ga/sub 0.47/As PIN photodiodes
Irradiation damage and its recovery behavior resulting from thermal annealing in In/sub 0.53/Ga/sub 0.47/As PIN photodiodes, subjected to a 20-MeV alpha ray, are studied. The degradation of the electrical and optical performance of diodes increases with increasing fluence. In the In/sub 0.53/Ga/sub 0.47/As epitaxial layers, hole and electron capture levels are induced by irradiation. The influence of the radiation source on the degradation and recovery is then discussed by comparison to 1-MeV electrons and 1-MeV fast neutrons with respect to the numbers of knock-on atoms and the nonionizing energy loss (NIEL). Isochronal thermal annealing for temperatures ranging from 75 to 300/spl deg/C shows that the device performance degraded by the irradiation recovers by thermal annealing, and that the recovery behavior has a radiation source dependence. The recovery increases with increasing annealing temperature. The amount of recovery for alpha rays is nearly the same as for neutron irradiation, while that for electron irradiation is much larger. The radiation source dependence of performance degradation is attributed to the difference of mass and the probability of nuclear collision for the formation of lattice defects.
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