{"title":"非平衡磁控溅射沉积带缓冲层的YBCO薄膜","authors":"Chunaeni Latief, M. Barmawi","doi":"10.1117/12.300667","DOIUrl":null,"url":null,"abstract":"YBCO thin film with strontium titanate buffer layer has been made by using unbalanced magnetron sputtering (UMS). It has been shown experimentally that resputtering effect, usually takes place in balanced magnetron sputtering and glow discharge sputtering is suppressed. It turns out that the critical temperature as well as the critical current is improved.","PeriodicalId":362287,"journal":{"name":"Thin Film Physics and Applications","volume":"50 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1998-02-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Deposition of YBCO thin film with buffer layer by unbalanced magnetron sputtering\",\"authors\":\"Chunaeni Latief, M. Barmawi\",\"doi\":\"10.1117/12.300667\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"YBCO thin film with strontium titanate buffer layer has been made by using unbalanced magnetron sputtering (UMS). It has been shown experimentally that resputtering effect, usually takes place in balanced magnetron sputtering and glow discharge sputtering is suppressed. It turns out that the critical temperature as well as the critical current is improved.\",\"PeriodicalId\":362287,\"journal\":{\"name\":\"Thin Film Physics and Applications\",\"volume\":\"50 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1998-02-20\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Thin Film Physics and Applications\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.300667\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Thin Film Physics and Applications","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.300667","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Deposition of YBCO thin film with buffer layer by unbalanced magnetron sputtering
YBCO thin film with strontium titanate buffer layer has been made by using unbalanced magnetron sputtering (UMS). It has been shown experimentally that resputtering effect, usually takes place in balanced magnetron sputtering and glow discharge sputtering is suppressed. It turns out that the critical temperature as well as the critical current is improved.
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