用数字全息干涉显微技术检测微光学

2016 4th International Conference on Photonics, Optics and Laser Technology (PHOTOPTICS) Pub Date : 2016-02-01 DOI:10.5220/0005742901400145

Varun Kumar, C. Shakher

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引用次数: 6

摘要

数字全息干涉显微镜(DHIM)是一种用于微光学检测的计量工具。本文介绍了微透镜凹陷高度(h)、曲率半径(ROC)和形状的测量方法。使用DHIM的优点是通过对有和无物体的重建相位进行干涉比较，避免了光学系统中像差引起的畸变。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Testing of micro-optics using digital holographic interferometric microscopy

Digital holographic interferometric microscopy (DHIM) is used as metrological tool for the testing of micro-optics. The paper presents the measurement of sag height (h), radius of curvature (ROC), and shape of micro-lens. The advantage of using the DHIM is that the distortions due to aberrations in the optical system are avoided by the interferometric comparison of reconstructed phase with and without the object.

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2016 4th International Conference on Photonics, Optics and Laser Technology (PHOTOPTICS)

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