Dae-Hee Weon, Jong-Hyeok Jeon, Jeong-Il Kim, S. Mohammadi, L. Katehi
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High-Q integrated 3-D inductors and transformers for high frequency applications
Using a novel 3-D fabrication technology, we have demonstrated, for the first time, very high frequency and high quality factor (Q) inductors and transformers on Si substrate. On high resistivity Si, this technology achieves a quality factor of Q>60 for 1nH inductor at frequencies of 3 to 7 GHz. High efficiency high-Q transformers with coupling factors 0.6
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