Estimation of Comb Structure Capacitance for MEMS Inertial Sensors

In this paper authors presents very important problem of estimation capacitance structures used in MEMS sensors. The importance comes from fact that during operation, inertial sensors which are built of solid materials deform because of external forces acting on them. Therefore typical capacitor consists of some electrodes changes its value because electrode changes its orientation. Here authors use analytical and FEM results to compare capacitance results and impact on accuracy of measurement.