用相位恢复技术测量晶体缺陷

Yudong Yao, Junyong Zhang, Yanli Zhang, Jianqiang Zhu
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引用次数: 2

摘要

在高功率激光系统中,制造过程中引入的晶体缺陷对光束质量影响很大;最终影响高功率激光系统的输出状态。相位恢复算法可以精确测量较大面积的残余周期扰动和较小的点缺陷等晶体缺陷,分辨率达到微米级。同时,本文所采用的多次近焦强度测量算法可以提取出被缺陷调制的焦斑形态,由于其高功率而无法直接测量。此外,还对算法进行了改进,使其能够使用更少的测量平面和更少的迭代次数来完成检索。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Measurement of crystal defects using phase retrieval technique
In high power laser systems, crystal defects introduced by manufacturing have significant impact on quality of light beams; finally affect the output status of high power laser system. The phase retrieval algorithm can precisely measure the crystal defects, such as the residual periodic perturbations in a relatively large area and the relatively small point defects, with the resolution of micrometer magnitude. At the same time, the multiple near-focus intensity measurements algorithm used here can retrieve the morphology of focal spot, which is modulated by the defects and cannot be directly measured due to its high power. In addition, the algorithm has been improved in order to use less measurement planes and less iteration times to complete retrieval.
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