基于遗传算法的CMOS图像传感器等离子体彩色滤光片优化

F. F. Mahani, A. Mahanipour, A. Mokhtari
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引用次数: 13

摘要

利用等离子体纳米孔阵列作为彩色滤光片,具有与CMOS工艺兼容等重要优点。彩色滤光片是lcd、led、CMOS图像传感器等应用的重要组件。本文采用遗传算法结合Lumerical FDTD软件,设计了一组红、绿、蓝三原色滤光片。滤光片由二氧化硅衬底上的铝膜上的纳米孔方形晶格组成。它们适用于CMOS图像传感器。尽管存在简化制造的实际限制,但滤光片的光学响应在红、绿、蓝滤光片的精确谐振波长中分别显示出30 - 43%的透射峰,FWHM分别为40 (nm)、50 (nm)和80 (nm)。这些结果证明了所提优化方法的有效性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Optimization of plasmonic color filters for CMOS image sensors by genetic algorithm
Utilization of a plasmonic nanohole array as a color filter, proposes important advantages like the compatibility with CMOS processes. A color filter is an important component for applications, such as LCDs, LEDs, CMOS image sensors, etc. In this article, a set of primary color filters (red, green and blue) are designed by an optimization procedure, employing genetic algorithm integrated with Lumerical FDTD software. The filters consist of a square lattice of nanoholes in an aluminum film on a silicon dioxide substrate. They are suitable for using in CMOS image sensors. Despite the practical restrictions to simplify the fabrication, the optical response of the filters have shown a transmission peak of 30–43 percent with a FWHM of 40 (nm), 50 (nm) and 80 (nm) in accurate resonant wavelengths of red, green, and blue filters, respectively. These results demonstrate the efficacy of the proposed optimization method.
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