用微圆孔电沉积铜箔测量双轴应力:利用滑移发生概率的方法

S. Kitaoka, Jianqiao Chen, N. Egami, J. Hasegawa
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引用次数: 5

摘要

研究了电沉积铜箔光蚀刻形成的微圆孔外围滑移带的发生与循环次数以及平面弯曲和循环扭转的循环应力大小的关系。结果表明,在双轴应力作用下,传统镀铜方法无法检测到元件的主应力,但可以利用基于滑动发生概率的方程来评估,该方程同时考虑了循环应力大小和循环次数。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Measurement of Biaxial Stress Using Electrodeposited Copper Foil with a Microcircular Hole : Method Using the Probability of the Occurrence of Slip
The dependence of slip band occurrence at the periphery of microcircular holes formed by photoetching in electrodeposited copper foil upon the number of cycles and cyclic stress magnitude for plane bending and cyclic torsion is examined. The results show that the principal stresses in an element under biaxial stresses, which are undetectable by the conventional copper electroplating method, can be evaluated using an equation based on the probability of slip occurrence, which takes into account both cyclic stress magnitude and the number of cycles.
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