纳米光刻idt上磁致伸缩金属化ScA1N/Si SAW谐振器的共振频率与磁场分析

2022 International Semiconductor Conference (CAS) Pub Date : 2022-10-12 DOI:10.1109/CAS56377.2022.9934338

G. Boldeiu, C. Nastase, A. Nicoloiu, A. Florescu, I. Zdru, D. Vasilache, A. Dinescu, A. Müller

{"title":"纳米光刻idt上磁致伸缩金属化ScA1N/Si SAW谐振器的共振频率与磁场分析","authors":"G. Boldeiu, C. Nastase, A. Nicoloiu, A. Florescu, I. Zdru, D. Vasilache, A. Dinescu, A. Müller","doi":"10.1109/CAS56377.2022.9934338","DOIUrl":null,"url":null,"abstract":"The paper analyses the variation of the resonance frequency vs magnetic field on novel SAW resonators fabricated on ScAINISi by e-beam nanolithography, using a magnetostrictive metallization (Ni). for the interdigitated transducers (IDTs). Measurements have been performed at room and cryogenic temperatures down to 100 K. and row data as well as time gated data are presented. The resonance frequencies were above 5 GHz, increasing with temperature. The influence of the external magnetic field (varied between -300 and +300 mT) was investigated in terms of resonance frequency shift. The devices were analyzed also targeting applications as magnetic field sensors.","PeriodicalId":380138,"journal":{"name":"2022 International Semiconductor Conference (CAS)","volume":"89 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-10-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Resonance frequency vs. magnetic field analysis for ScA1N/Si SAW resonators with magnetostrictive metalization on the nanolithographic IDTs\",\"authors\":\"G. Boldeiu, C. Nastase, A. Nicoloiu, A. Florescu, I. Zdru, D. Vasilache, A. Dinescu, A. Müller\",\"doi\":\"10.1109/CAS56377.2022.9934338\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The paper analyses the variation of the resonance frequency vs magnetic field on novel SAW resonators fabricated on ScAINISi by e-beam nanolithography, using a magnetostrictive metallization (Ni). for the interdigitated transducers (IDTs). Measurements have been performed at room and cryogenic temperatures down to 100 K. and row data as well as time gated data are presented. The resonance frequencies were above 5 GHz, increasing with temperature. The influence of the external magnetic field (varied between -300 and +300 mT) was investigated in terms of resonance frequency shift. The devices were analyzed also targeting applications as magnetic field sensors.\",\"PeriodicalId\":380138,\"journal\":{\"name\":\"2022 International Semiconductor Conference (CAS)\",\"volume\":\"89 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-10-12\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2022 International Semiconductor Conference (CAS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/CAS56377.2022.9934338\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2022 International Semiconductor Conference (CAS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CAS56377.2022.9934338","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

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摘要

本文分析了采用磁致伸缩金属化(Ni)的电子束纳米光刻在ScAINISi上制备的新型SAW谐振器的谐振频率随磁场的变化规律。用于交叉换能器(idt)。在室温和低温下进行了测量，温度低至100 k，并给出了行数据和时间门控数据。谐振频率在5 GHz以上，随温度升高而增加。从谐振频移的角度研究了外磁场(变化在-300和+300 mT之间)的影响。针对磁场传感器的应用，对器件进行了分析。

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Resonance frequency vs. magnetic field analysis for ScA1N/Si SAW resonators with magnetostrictive metalization on the nanolithographic IDTs

The paper analyses the variation of the resonance frequency vs magnetic field on novel SAW resonators fabricated on ScAINISi by e-beam nanolithography, using a magnetostrictive metallization (Ni). for the interdigitated transducers (IDTs). Measurements have been performed at room and cryogenic temperatures down to 100 K. and row data as well as time gated data are presented. The resonance frequencies were above 5 GHz, increasing with temperature. The influence of the external magnetic field (varied between -300 and +300 mT) was investigated in terms of resonance frequency shift. The devices were analyzed also targeting applications as magnetic field sensors.

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2022 International Semiconductor Conference (CAS)

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