千兆赫频率石墨烯晶体管,产率高,应变稳定性好

W. Wei, S. Mhedhbi, S. B. Salk, T. Levert, O. Txoperena, E. Pallecchi, H. Happy
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引用次数: 0

摘要

我们报道了一种适用于柔性衬底石墨烯场效应晶体管(gfet)的无键制造工艺。在Kapton衬底上成功制备了不同栅极长度(100 nm、200 nm和300 nm)和不同通道宽度(12 \mu \mathrm{m}、24 \mu \mathrm{m}$和50 \mu \mathrm{m})$的晶体管。晶体管的良率超过80%。我们的gfet在0.5%的应变下表现出良好的稳定性。我们的发现为基于石墨烯晶体管的射频电路的下一步应用奠定了基础。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Gigahertz Frequency Graphene Transistor, high yield process and good stability under strain
We report a bonding free fabrication process suitable for flexible substrate based graphene field effect transistors (GFETs). Transistors with different gate length (100 nm, 200 nm and 300 nm) and different channel width $(12 \mu \mathrm{m}, 24 \mu \mathrm{m}$ and $50 \mu \mathrm{m})$ are successfully fabricated on Kapton substrate. The transistor yield is more than 80%. Our GFETs exhibit good stability with 0.5% strain applied. Our finding ensures for next application of RF circuit based on graphene transistor.
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