SnO2纳米晶薄膜的感氢性能

2017 21st European Microelectronics and Packaging Conference (EMPC) & Exhibition Pub Date : 2017-09-01 DOI:10.23919/EMPC.2017.8346917

W. Izydorczyk, Natalia Niemiec, K. Waczyński, J. Uljanow

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引用次数: 1

摘要

本文给出了对氢的响应结果。采用前驱体溶液自旋镀膜的方法在硅衬底上制备了SnO2纳米晶薄膜，然后在不同温度(200-700℃)的氧气气氛中慢热退火。前驱体溶液由1.0 ~ 2.0 M SnCl4·5H2O和异丙醇组成。在氮气气氛中，氢气浓度为0.5% ~ 1.5%，温度为175℃~ 330℃时，测量了层电阻的变化。在275°C时观察到最大的传感器响应。另一方面，在330°C时观察到最短的响应时间。

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Hydrogen sensing properties of SnO2 nanocrystalline thin films

The results of response to hydrogen were presented in this work. SnO2 nanocrystalline thin films have been deposited on silicon substrates by spin-coating from precursor solution, followed by slow thermal annealing in oxygen atmosphere at different temperatures (200–700 °C). The precursor solution consisted of 1.0–2.0 M SnCl4·5H2O in isopropanol. Changes in the layers resistance were measured for the hydrogen concentration range of 0.5%–1.5% in nitrogen atmosphere and in temperature range from 175 °C to 330 °C. Maximum sensor response was observed at 275 °C. On the other hand, the shortest response times were observed at 330 °C.

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2017 21st European Microelectronics and Packaging Conference (EMPC) & Exhibition

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