一种零变化45nm SOI工艺的单片集成光发射器和接收器

M. Georgas, B. Moss, Chen Sun, J. Shainline, J. Orcutt, M. Wade, Yu-hsin Chen, Kareem Nammari, J. Leu, Aravind Srinivasan, Rajeev J Ram, M. Popović, V. Stojanović
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引用次数: 25

摘要

在没有任何工艺改变的情况下,首次在商业45nm SOI工艺中展示了具有单片集成光子器件和电路的光发射器和接收器。该发射机采用交错结载波耗尽环调制器,工作速度为3.5Gb/s,消光比为8dB,电路和器件的综合能量成本为70fJ/bit。光接收器连接1180nm波长的集成SiGe探测器,灵敏度为15μA,运行速度为2.5Gb/s,能量成本为220fJ/bit。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A monolithically-integrated optical transmitter and receiver in a zero-change 45nm SOI process
An optical transmitter and receiver with monolithically-integrated photonic devices and circuits are demonstrated together for the first time in a commercial 45nm SOI process, without any process changes. The transmitter features an interleaved-junction carrier-depletion ring modulator and operates at 3.5Gb/s with an 8dB extinction ratio and combined circuit and device energy cost of 70fJ/bit. The optical receiver connects to an integrated SiGe detector designed for 1180nm wavelength and performs at 2.5Gb/s with 15μA sensitivity and energy cost of 220fJ/bit.
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