聚焦离子束光刻微纳米光学原型技术

{"title":"聚焦离子束光刻微纳米光学原型技术","authors":"K. Keskinbora","doi":"10.1117/3.2531118","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":159304,"journal":{"name":"Prototyping Micro- and Nano-Optics with Focused Ion Beam Lithography","volume":"218 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-04-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Prototyping Micro- and Nano-Optics with Focused Ion Beam Lithography\",\"authors\":\"K. Keskinbora\",\"doi\":\"10.1117/3.2531118\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":159304,\"journal\":{\"name\":\"Prototyping Micro- and Nano-Optics with Focused Ion Beam Lithography\",\"volume\":\"218 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-04-18\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Prototyping Micro- and Nano-Optics with Focused Ion Beam Lithography\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/3.2531118\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Prototyping Micro- and Nano-Optics with Focused Ion Beam Lithography","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/3.2531118","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}