高度可靠的模附结合蚀刻黄铜片

Sri Krishna Bhogaraju, M. Schmid, H. Kotadia, F. Conti, G. Elger
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引用次数: 0

摘要

研制了一种高可靠性的蚀刻黄铜片微颗粒烧结浆料。实现了低温(275^{\circ}\ maththrm {C})、低压(10 MPa)和快速(5 min)的压模工艺,烧结接头的平均抗剪强度为60 MPa。在烧结膏体配方中使用聚乙二醇600 (PEG600),可以在恒定的氮气流下在开放的键合腔中原位还原氧化铜并烧结,而不受残余氧的影响。即使在高应力热冲击循环下,由蚀刻黄铜片实现的烧结互连在1000次循环后抗剪强度也没有下降。随着时间的推移,互连的孔隙率影响氧化。在相互堆叠的纯铜薄片中,观察到(220)晶粒取向的优先生长。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Highly reliable die-attach bonding with etched brass flakes
Highly reliable microparticle sinter paste based on etched brass flakes is developed. A low temperature $(275^{\circ}\mathrm{C})$, low pressure (10 MPa) and fast (5 min) die-attach process resulting in sintered interconnects with an average shear strength of 60 MPa is realized. The use of polyethylene glycol 600 (PEG600) in the sinter paste formulation allows an in-situ reduction of copper oxide and sintering in an open bond chamber under a constant nitrogen flow with no influence of residual oxygen. Even under high stress thermal shock cycling, the sintered interconnects realized by the etched brass flakes show no drop in shear strength after 1000 cycles. Porosity of the interconnect affects the oxidation with time. In pure Cu flakes, stacking over each other, a preferential growth in (220) grain orientation is observed.
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