高品质的1-V约瑟夫逊系列阵列在KRISS开发

Proceedings of Conference on Precision Electromagnetic Measurements Digest Pub Date : 1994-06-27 DOI:10.1109/CPEM.1994.333431

Se Ii Park, Kyu-Tae Kim, R. Lee

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摘要

将选择性铌阳极氧化工艺(SNAP)与图像反转技术(IRT)相结合，开发了一种集成约瑟夫森系列阵列的新工艺。含有2520个Nb/Al/sub 2/O/sub 3//Nb隧道结的阵列可产生高达2 V的稳定量化电压阶跃，稳定时间超过5小时。

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A high quality 1-V Josephson series array developed at KRISS

By combining the selective niobium anodization process (SNAP) and the image reversal technique (IRT) a new fabrication process of integrated Josephson series array has been developed at KRISS. The array containing 2520 Nb/Al/sub 2/O/sub 3//Nb tunnel junctions produced stable quantized voltage steps up to 2 V with stability times of more than 5-h.<>

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Proceedings of Conference on Precision Electromagnetic Measurements Digest

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