一种新型热驱动硅微泵

1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311) Pub Date : 1997-10-05 DOI:10.1109/MHS.1997.768885

J. Zou, X. Ye, Z. Zhou, Y. Yang

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引用次数: 22

摘要

采用有限元法对微泵中双金属微驱动器的热动力学进行了分析。在此基础上，研制了一种新型热驱动硅微泵。这种微型泵采用双金属热驱动和热气动驱动。所述双金属微致动器由铝膜和硅膜组成。设计了气室，实现热气动驱动。采用表面微加工技术研制了一种新型微型止回阀。这种微型阀门具有很高的反向到正向流动阻力和非常小的反向泄漏。

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A novel thermally-actuated silicon micropump

The thermal dynamics of a bimetallic microactuator in micropump are analyzed by using FEM. On the basis of the analysis, a novel thermally-actuated silicon micropump is developed. This micropump utilizes both bimetallic thermal actuation and thermal pneumatic actuation. The bimetallic microactuator is composed of an aluminum membrane and a silicon membrane. An air chamber is also designed to realize the thermal pneumatic actuation. A new micro check valve is developed through surface micromachining. This microvalve has a high reverse-to-forward flow resistance and a very small reverse leakage.

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来源期刊

1997 International Symposium on Micromechanics and Human Science (Cat. No.97TH8311)

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