生物传感应用中BiCMOS嵌入式微流控平台的建模与表征

2014 IEEE Topical Conference on Biomedical Wireless Technologies, Networks, and Sensing Systems (BioWireleSS) Pub Date : 2014-06-09 DOI:10.1109/BIOWIRELESS.2014.6827742

C. Kaynak, M. Kaynak, M. Wietstruck, S. Marschmeyer, P. Kulse, K. Schulz, H. Silz, A. Kruger, R. Barth, K. Schmalz, B. Tillack

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引用次数: 9

摘要

本文介绍了用于生物传感应用的BiCMOS嵌入式微流控平台的建模和表征。这种新型的双键合晶圆工艺集成方案提供了微通道，可以方便地访问入口和出口以及毫米波传感器。所开发的微流控平台在BiCMOS芯片上提供了非常灵活的微通道尺寸，并且能够使流体非常接近传感器。一个完全集成的120 GHz介电传感器已被用于该平台的演示。高重现性、微米尺寸、高通量和低成本的工艺使BiCMOS集成微流控通道成为生物和太赫兹传感应用的关键平台。

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Modeling and characterization of BiCMOS embedded microfluidic platform for biosensing applications

In this paper, modeling and characterization of BiCMOS embedded microfluidic platform for biosensing applications is presented. The novel process integration scheme with two bonded wafers provides microchannels, accessing to the inlets and the outlets as well as the mm-wave sensor easily. The developed microfluidic platform provides very flexible size of microchannels in BiCMOS chip and it is able to bring the fluid very close to the sensor. A fully integrated 120 GHz dielectric sensor has been used for the demonstration of the platform. The high reproducibility, micron size, high throughput and low-cost process make the presented BiCMOS integrated microfluidic channels as a key platform for bio and THz sensing applications.

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2014 IEEE Topical Conference on Biomedical Wireless Technologies, Networks, and Sensing Systems (BioWireleSS)

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