高辐射环境耗尽型CMOS传感器综述与展望

T. Hemperek
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引用次数: 4

摘要

为了应对预期在HL-LHC中增加的辐射水平,正在研究使用单片CMOS像素探测器的新方法,其中读出电子器件和耗尽电荷收集层相结合。这些设备依靠辐射硬工艺技术、多个嵌套井、高电阻率衬底和施加高电压偏置的能力来实现显著的耗尽深度。它们可以变薄和背面处理偏置。自2014年以来,ATLAS的20多个小组成员在ATLAS演示程序中合作进行CMOS像素研发,追求传感器设计和表征,目标是证明耗尽CMOS像素适合LHC的高速率,快速定时和高辐射操作。许多CMOS技术供应商已经接触在这方面的努力。本报告介绍了在HL-LHC中使用CMOS像素探测器所面临的挑战,并总结了不同的概念和耗尽CMOS原型设计的现状。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Overview and perspectives of depleted CMOS sensors for high radiation environments
To cope with increased radiation levels expected at the HL-LHC new approaches are being investigated using monolithic CMOS pixel detectors where readout electronics and depleted charge collection layer are combined. Those devices rely on radiation hard process technology, multiple nested wells, high resistivity substrates and ability to apply high voltage bias to achieve significant depletion depths. They can be thinned and backside processed for biasing. Since 2014, members of more than 20 groups in ATLAS are collaborating in CMOS pixel R&D in an ATLAS Demonstrator program pursuing sensor design and characterization with the goal to demonstrate that depleted CMOS pixels are suited for high rate, fast timing and high radiation operation at LHC. Many CMOS technology vendors have been approached in this effort. This presentation introduces challenges for the usage of CMOS pixel detectors at HL-LHC and gives a summary of different concepts and the current state of designs of depleted CMOS prototypes.
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