{"title":"基于高阻抗表面碳纳米管膜MEMS的可重构毫米波移相器","authors":"A. Generalov, D. Lioubtchenko, A. Raisanen","doi":"10.1109/GSMM.2015.7175112","DOIUrl":null,"url":null,"abstract":"A novel phase shifter based on high impedance surface (HIS) with carbon nanotube (CNT) membrane MEMS is proposed. The CNT MEMS HIS is integrated into a dielectric rod waveguide (DRW) so that the CNT membrane acts as a movable ground plane. We present a novel fabrication method of the phase shifter being significantly simpler than those previously used. The device performance is verified through numerical simulations that show a theoretical phase shift of 260° with a 7 volt bias applied. So far we have experimentally demonstrated a CNT membrane varactor, where the distance of the CNT membrane and metal patches changed from 2 μm to 0.4 μm with a 10 volt bias.","PeriodicalId":405509,"journal":{"name":"Global Symposium on Millimeter-Waves (GSMM)","volume":"11 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-05-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"7","resultStr":"{\"title\":\"Reconfigurable mm-wave phase shifter based on high impedance surface with carbon nanotube membrane MEMS\",\"authors\":\"A. Generalov, D. Lioubtchenko, A. Raisanen\",\"doi\":\"10.1109/GSMM.2015.7175112\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A novel phase shifter based on high impedance surface (HIS) with carbon nanotube (CNT) membrane MEMS is proposed. The CNT MEMS HIS is integrated into a dielectric rod waveguide (DRW) so that the CNT membrane acts as a movable ground plane. We present a novel fabrication method of the phase shifter being significantly simpler than those previously used. The device performance is verified through numerical simulations that show a theoretical phase shift of 260° with a 7 volt bias applied. So far we have experimentally demonstrated a CNT membrane varactor, where the distance of the CNT membrane and metal patches changed from 2 μm to 0.4 μm with a 10 volt bias.\",\"PeriodicalId\":405509,\"journal\":{\"name\":\"Global Symposium on Millimeter-Waves (GSMM)\",\"volume\":\"11 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2015-05-25\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"7\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Global Symposium on Millimeter-Waves (GSMM)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/GSMM.2015.7175112\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Global Symposium on Millimeter-Waves (GSMM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/GSMM.2015.7175112","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Reconfigurable mm-wave phase shifter based on high impedance surface with carbon nanotube membrane MEMS
A novel phase shifter based on high impedance surface (HIS) with carbon nanotube (CNT) membrane MEMS is proposed. The CNT MEMS HIS is integrated into a dielectric rod waveguide (DRW) so that the CNT membrane acts as a movable ground plane. We present a novel fabrication method of the phase shifter being significantly simpler than those previously used. The device performance is verified through numerical simulations that show a theoretical phase shift of 260° with a 7 volt bias applied. So far we have experimentally demonstrated a CNT membrane varactor, where the distance of the CNT membrane and metal patches changed from 2 μm to 0.4 μm with a 10 volt bias.
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