SOI微悬臂传感器的面内光子转导

3rd IEEE International Conference on Group IV Photonics, 2006. Pub Date : 2006-10-09 DOI:10.1109/GROUP4.2006.1708146

G. Nordin, S. Kim, Y. Qian, J. Noh, J. Jiang

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引用次数: 2

摘要

本文介绍了一种新的微悬臂转导机制，用于绝缘体上硅(SOI)微悬臂，该微悬臂易于扩展到大型阵列，同时保持非常紧凑的外形因素和高灵敏度。该机制基于对悬臂梁尖端位置的微分光学检测，其中悬臂梁本身形成单模光脊波导微分分路器。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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In-Plane Photonic Transduction of SOI Microcantilever Sensors

In this paper, a new microcantilever transduction mechanism for silicon-on-insulator (SOI) microcantilevers that readily scales to large arrays while maintaining a very compact form factor and high sensitivity is introduced. This mechanism is based on differential optical detection of the cantilever tip position in which the cantilever itself forms a single mode optical ridge waveguide differential splitter.

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3rd IEEE International Conference on Group IV Photonics, 2006.

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