用下拉法从熔体中生长单晶空心管的轴对称二维描述

A. Balint, S. Balint, Loredana Tanasie
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引用次数: 0

摘要

本文利用微下拉法对单晶管生长过程进行了二维轴对称描述。描述涉及以下方面:内部和外部自由表面方程以及这些自由表面上的压力差(第2节);自由表面上压力差的极限(第3节);在第5节中,以内半径为4.28 × 10-3[m],外半径为4.72 × 10-3[m]的硅微管的生长为例,对上述各方面进行了数值研究。这种描述的优点是,它有助于更好地理解管的内外半径尺寸对内外自由表面压差的依赖关系,并可能有助于制造的自动化。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
An Axis Symmetric 2D Description of the Growth Process of a Single Crystal Hollow Tube Grown from the Melt by Pulling Down Method
This paper is an axis symmetric 2D description of a single crystal tube growth process by micro-pulling–down (PD) method. The description concerns the following aspects: the inner and outer free surfaces equations and the pressure differences across this free surfaces (section 2.); limits of the pressure differences across the free surfaces (section 3.); static stability of the capillary free surfaces (section 4). In section 5 the above aspects are numerically investigated in the case of the growth of a silicon micro tube of inner radius equal to 4.28x10-3[m] and outer radius equal to 4.72x10-3 [m]. The advantage of this description is that it helps to better understand the dependence of the inner and outer radius size of the tube on the pressure difference across the inner and outer free surface respectively, and may help the automation of manufacturing.
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