紧凑密封电子真空装置中环形放电的无损气体压力测量

Fei Yan, D. Jin, Lei Chen, X. Wan, K. Xiao
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引用次数: 1

摘要

测量紧凑密封电子真空装置内部的压力是一个困难的命题,通常需要破坏性分析。在本文中,我们提供了一种不操作设备的间接压力测量方法。为此,建立了一个简单紧凑的彭宁式放电结构,该结构仅包括两个电极和一个附加的永磁体。研究了不同阳极电压和压力下的放电特性。分析了密闭式电子真空装置内部压力测量的原理,得到了压力-电流图。持续放电以可测量的压力变化电流冲击,起始压强为1-10-2 Pa的氦气。这些结果证明了这项研究的有效性,并且通过将我们的结构应用于紧凑的密封电子真空设备,可以在不刺穿真空包层的情况下测量管内压力。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Non-destructive gas pressure measurement in compact sealed electronic vacuum devices by penning-type discharge
Measuring the pressure inside the compact sealed electronic vacuum devices is a difficult proposition that typically requires destructive analysis. In the paper, we offer an indirectly method to pressure measurement without operating the devices. Towards that end, a simple and compact Penning-type diacharge structure only include two electrodes and an additional permanent magnet is established. The discharge characteristics under different anode voltages and different pressures are studied. The principle in measuring the pressure inside compact sealed electronic vacuum devices is analyzed, and the pressure-current chart is acquired. A sustaining discharge strikes with a measurable pressure varying current starting at a pressure of 1-10-2 Pa of helium. These results demonstrate the validity of this research and by applying our structure to compact sealed electronic vacuum devices, pressures inside the tubes can be measured without puncturing the vacuum envelope.
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