从x射线强度重建薄膜轮廓的严格数学模型

International Seminar Day on Diffraction Millennium Workshop (IEEE Cat. No.00EX450) Pub Date : 1900-01-01 DOI:10.1109/DD.2000.902369

S. Slavyanov, C. Ern, H. Dosch

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引用次数: 1

摘要

我们提出了一种新的理论方法，它允许通过阵列衍射观察到的与薄膜相关的剖面函数的分析重建。我们的概念是基于用适当的线性微分方程来表示轮廓函数，这些方程带有多项式系数，具有直接的傅里叶变换。讨论了几个具有实际意义的理论实例。

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Rigorous mathematical models for the reconstruction of thin films profiles from X-ray intensities

We present a novel theoretical approach which allows the analytical reconstruction of profile functions associated with thin films as observed by array diffraction. Our concept is based on the representation of the profile function by appropriate linear differential equations with polynomial coefficients that have straight forward Fourier transforms. Several theoretical examples of practical importance are discussed.

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$International Seminar Day on Diffraction Millennium Workshop (IEEE Cat. No.00EX450)$

International Seminar Day on Diffraction Millennium Workshop (IEEE Cat. No.00EX450)

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