G. De Paoli, S. L. Jantzen, T. D. Bucio, I. Skandalos, C. Holmes, Peter G. R. Smith, M. Milosevic, F. Gardes
{"title":"氮化硅光子器件制造后永久激光修整","authors":"G. De Paoli, S. L. Jantzen, T. D. Bucio, I. Skandalos, C. Holmes, Peter G. R. Smith, M. Milosevic, F. Gardes","doi":"10.1109/BICOP48819.2019.9059592","DOIUrl":null,"url":null,"abstract":"We demonstrated the possibility of trimming the operating wavelength of nitrogen-rich silicon nitride racetrack resonators by exposing the devices to an ultraviolet laser. The results revealed that in a few seconds only, the resonant wavelength of fabricated devices could be tuned to any point within a free spectral range. This technique can also be applied to trim the response of any other silicon photonic device based on nitrogen-rich silicon nitride.","PeriodicalId":339012,"journal":{"name":"2019 IEEE 2nd British and Irish Conference on Optics and Photonics (BICOP)","volume":"44 4","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Post Fabrication Permanent Laser Trimming of Silicon Nitride Photonic Devices\",\"authors\":\"G. De Paoli, S. L. Jantzen, T. D. Bucio, I. Skandalos, C. Holmes, Peter G. R. Smith, M. Milosevic, F. Gardes\",\"doi\":\"10.1109/BICOP48819.2019.9059592\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We demonstrated the possibility of trimming the operating wavelength of nitrogen-rich silicon nitride racetrack resonators by exposing the devices to an ultraviolet laser. The results revealed that in a few seconds only, the resonant wavelength of fabricated devices could be tuned to any point within a free spectral range. This technique can also be applied to trim the response of any other silicon photonic device based on nitrogen-rich silicon nitride.\",\"PeriodicalId\":339012,\"journal\":{\"name\":\"2019 IEEE 2nd British and Irish Conference on Optics and Photonics (BICOP)\",\"volume\":\"44 4\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2019 IEEE 2nd British and Irish Conference on Optics and Photonics (BICOP)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/BICOP48819.2019.9059592\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 IEEE 2nd British and Irish Conference on Optics and Photonics (BICOP)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/BICOP48819.2019.9059592","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Post Fabrication Permanent Laser Trimming of Silicon Nitride Photonic Devices
We demonstrated the possibility of trimming the operating wavelength of nitrogen-rich silicon nitride racetrack resonators by exposing the devices to an ultraviolet laser. The results revealed that in a few seconds only, the resonant wavelength of fabricated devices could be tuned to any point within a free spectral range. This technique can also be applied to trim the response of any other silicon photonic device based on nitrogen-rich silicon nitride.
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