压力传感器应用中悬浮石墨烯器件的应变工程

A. D. Smith, S. Vaziri, A. Delin, M. Ostling, M. Lemme
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引用次数: 22

摘要

本文介绍了一种控制和测量石墨烯膜应变的装置结构。我们建议通过在覆盖石墨烯膜的腔体内外之间制造压力差来诱导应变。结合紧密结合计算和COMSOL模型预测石墨烯在特定条件下的应变引起的带隙,并为潜在的器件布局提供指导。制造器件的拉曼光谱表明了这种方法的可行性。最终,压力引起的带结构变化可以通过电来检测,这表明了超灵敏压力传感器的应用。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Strain engineering in suspended graphene devices for pressure sensor applications
The present paper describes a device structure for controlling and measuring strain in graphene membranes. We propose to induce strain by creating a pressure difference between the inside and the outside of a cavity covered with a graphene membrane. The combination of tight-binding calculations and a COMSOL model predicts strain induced band gaps in graphene for certain conditions and provides a guideline for potential device layouts. Raman spectroscopy on fabricated devices indicates the feasibility of this approach. Ultimately, pressure-induced band structure changes could be detected electrically, suggesting an application as ultra-sensitive pressure sensors.
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