用于测量MOSFET通道电导和阈值电压的标准偏差的测试电路

Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002. Pub Date : 2002-04-08 DOI:10.1109/ICMTS.2002.1193172

K. Terada, M. Sumida

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引用次数: 11

摘要

提出了一种新的测试电路，用于测量MOSFET沟道电导和阈值电压的标准差。该测试电路由矩阵形MOSFET阵列组成，其中添加了几个开关和接线。测量流过该阵列的直流电流，改变开关的开/关状态，然后从中计算标准差。

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A test circuit for measuring standard deviations of MOSFET channel conductance and threshold voltage

A new test circuit is proposed for measuring the standard deviations of both MOSFET channel conductance and threshold voltage. This test circuit consists of the matrix-shape MOSFET array in which several switches and wiring are added. DC currents flowing through this array are measured, changing the ON/OFF states of the switches, and then the standard deviations are calculated from them.

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来源期刊

Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002.

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