利用新型V-SPOT技术测量球面表面形状和浓度的新方法

E. Hofbauer, R. Kometer
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引用次数: 2

摘要

精确测量非球面透镜甚至自由曲面的焦点是光学制造中大多数设备面临的挑战。我们提供了一种新的尝试,通过结合自动准直装置和渐晕场止光器[1,2,3]装置,以偏转法测量透镜集中度和矢状面轮廓。两种设备独立工作,精度高。本演示解释了技术设置,包括一个自动准直传感器(ELWIMAT- akf)和一个逐光场停止传感器(ELWIMAT V-SPOT),它与一个空气轴承转台垂直安装在一起。其次,给出了浓度测量结果和表面重建结果以及矢状角偏差的斜率误差。最后,对非球面测量结果(高级别专家会议HLEM样品#3)进行了严格讨论,以说明所提出的测量尝试的准确性和适用性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A new approach to surface shape and centration measurement on aspheres with the new V-SPOT technology
Accurate measurement of centration of aspheric lenses or even freeforms is a challenge for most devices in optical manufacturing. We are providing a new attempt by combining an autocollimation device and a Vignetting Field Stop [1, 2, 3] device to measure lens centration and sagittal surface profile in a deflectometric approach. Both devices work independently at high accuracy. This presentation explains the technical setup, consisting of an autocollimation sensor (ELWIMAT-AKF) and a Vignetting Field Stop Sensor (ELWIMAT V-SPOT), which is mounted together with an air bearing rotary table in a vertical arrangement. Secondly, we provide the results of the centration measurement and the results from the surface reconstruction and slope error from the measured sagittal angle deviations. Finally, the results from a measured asphere (High Level Expert Meeting HLEM sample #3) is critically discussed to state the accuracy and applicability of the proposed measurement attempt.
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