用于原子力显微镜的新型纳米悬臂梁的制备

2008 9th International Conference on Solid-State and Integrated-Circuit Technology Pub Date : 2008-12-30 DOI:10.1109/ICSICT.2008.4735072

Li Li, Xiang Han, Wengang Wu, F. Ding, Qinghua Chen

{"title":"用于原子力显微镜的新型纳米悬臂梁的制备","authors":"Li Li, Xiang Han, Wengang Wu, F. Ding, Qinghua Chen","doi":"10.1109/ICSICT.2008.4735072","DOIUrl":null,"url":null,"abstract":"As a first step to realize novel cantilevers to be used in the atomic force microscopy (AFM), we have fabricated a Poly-Si cantilever with enhanced high-aspect-ratio nanotips. The tips with well controlled dimensions are fabricated by crossed spacer technology and the flexibility of the cantilever and the nanotips according to demand can be easily realized by designing the pattern and tuning the etching time in the fabrication process. The tips on the cantilever, with 1.2 ¿m height, have a high aspect ratio of 7:1. This nanotip on the cantilevers can not only be used as an AFM probe, it can also be extended to any two-dimensional nanotip arrays to be widely used in biomedical field such as biomedical specimen micro-extractions and transportations.","PeriodicalId":436457,"journal":{"name":"2008 9th International Conference on Solid-State and Integrated-Circuit Technology","volume":"27 6","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2008-12-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Fabrication of novel cantilever with nanotip for AFM applications\",\"authors\":\"Li Li, Xiang Han, Wengang Wu, F. Ding, Qinghua Chen\",\"doi\":\"10.1109/ICSICT.2008.4735072\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"As a first step to realize novel cantilevers to be used in the atomic force microscopy (AFM), we have fabricated a Poly-Si cantilever with enhanced high-aspect-ratio nanotips. The tips with well controlled dimensions are fabricated by crossed spacer technology and the flexibility of the cantilever and the nanotips according to demand can be easily realized by designing the pattern and tuning the etching time in the fabrication process. The tips on the cantilever, with 1.2 ¿m height, have a high aspect ratio of 7:1. This nanotip on the cantilevers can not only be used as an AFM probe, it can also be extended to any two-dimensional nanotip arrays to be widely used in biomedical field such as biomedical specimen micro-extractions and transportations.\",\"PeriodicalId\":436457,\"journal\":{\"name\":\"2008 9th International Conference on Solid-State and Integrated-Circuit Technology\",\"volume\":\"27 6\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2008-12-30\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2008 9th International Conference on Solid-State and Integrated-Circuit Technology\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICSICT.2008.4735072\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 9th International Conference on Solid-State and Integrated-Circuit Technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSICT.2008.4735072","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 3

摘要

作为实现用于原子力显微镜(AFM)的新型悬臂梁的第一步，我们制造了一种具有增强高纵横比纳米尖端的多晶硅悬臂梁。采用交叉间隔片技术制备了尺寸可控的纳米尖，在制作过程中通过图案设计和蚀刻时间的调整，可以很容易地实现悬臂梁和纳米尖的灵活性。悬臂上的尖端高度为1.2米，宽高比为7:1。这种悬臂梁上的纳米探针不仅可以作为AFM探针，还可以扩展到任何二维纳米探针阵列，广泛应用于生物医学领域，如生物医学标本的微提取和运输。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Fabrication of novel cantilever with nanotip for AFM applications

As a first step to realize novel cantilevers to be used in the atomic force microscopy (AFM), we have fabricated a Poly-Si cantilever with enhanced high-aspect-ratio nanotips. The tips with well controlled dimensions are fabricated by crossed spacer technology and the flexibility of the cantilever and the nanotips according to demand can be easily realized by designing the pattern and tuning the etching time in the fabrication process. The tips on the cantilever, with 1.2 ¿m height, have a high aspect ratio of 7:1. This nanotip on the cantilevers can not only be used as an AFM probe, it can also be extended to any two-dimensional nanotip arrays to be widely used in biomedical field such as biomedical specimen micro-extractions and transportations.

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2008 9th International Conference on Solid-State and Integrated-Circuit Technology

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