聚焦电子束注入气体过程中产生压差的电物理方法

2007 Siberian Conference on Control and Communications Pub Date : 2007-04-20 DOI:10.1109/SIBCON.2007.371319

A. Chugunov, D. Kaurov, L. Orlikov

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引用次数: 0

摘要

在电子束注入气体过程中，电子源的真空维持问题是利用抽离效应来解决的，抽离效应是由压差系统中的抽离光束或放电产生的。

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Electrophysical Methods of Pressure Differential Generation in the Course of Injection of Focused Electron Beams into Gas

The problem of vacuum maintenance in an electron source during beams injection into gas is solved with the use of the pumping-out effect, produced by a removed beam or a discharge in a system of pressure differential.

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2007 Siberian Conference on Control and Communications

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