基于氧化铪的铁电场效应晶体管的高寿命策略

J. Müller, P. Polakowski, S. Müller, H. Mulaosmanovic, J. Ocker, T. Mikolajick, S. Slesazeck, S. Flachowsky, M. Trentzsch
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引用次数: 62

摘要

本文讨论了克服氧化铪基铁电场效应晶体管寿命限制的潜在策略。这些途径是基于高界面场应力和金属-铁电-绝缘体-半导体栅堆中伴随的电荷注入是程序和擦除操作中主要的退化机制的假设。评估了三种能够降低或消除界面场应力的不同方法:降低极化反转引起的电场应力;利用低压分回路运行;改变栅极堆内的电容分压器。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
High endurance strategies for hafnium oxide based ferroelectric field effect transistor
In this paper potential strategies to overcome the endurance limitations of hafnium oxide based ferroelectric field effect transistors are discussed. These pathways are based on the assumption that the high interfacial field stress and the accompanying charge injection in the metal-ferroelectric-insulator-semiconductor gate stack are the dominant degradation mechanisms during program and erase operation. Three different approaches capable of lowering or eliminating the interfacial field stress are being assessed - lowering the electrical field stress induced by polarization reversal; utilizing low voltage sub-loop operation; altering the capacitive divider within the gate stack.
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