一种测量非球面的动态带板干涉仪

Topical Meeting on Holography Pub Date : 1900-01-01 DOI:10.1364/holography.1986.mb1

N. Ohyama, I. Ichimura, I. Yamaguchi, T. Honda, J. Tsujiuchi

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引用次数: 1

摘要

本文提出了一种动态带板干涉仪(DZPI)，它可以在不需要标准表面或计算机生成全息图(CGH)的情况下测量非球面。采用λ/100左右的条纹分析方法可以提高表面误差测量的精度。并给出了实验结果。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A Dynamic Zone Plate Interferometer for Measuring Aspherical Surfaces

This paper proposes a dynamic zone plate interferometer (DZPI), which has a possibility of measuring aspherical surfaces without the need of either a standard surface or of a computer generated holograms (CGH). The accuracy of surface error measurments can be improved by using a fringe analysis method up to about λ/100. An experimantal result is also presented.

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Topical Meeting on Holography

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