用溅射界面改善WC-Co衬底上的金刚石膜

Xianchang He, H. Shen, Zhi-Mimg Zhang, Shenghua Li
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摘要

为了提高金刚石膜在WC-Co衬底上的附着力,采用溅射技术在TiC和SiC之间引入了界面。利用x射线衍射、拉曼光谱和扫描电镜对膜的结构和表面形貌进行了表征。通过切削试验对涂层与基体的结合力进行了评价。此外,还进行了垂直拉伸试验,测量了膜的附着强度,表明界面层的引入对膜的附着强度的提高起到了重要的作用。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Diamond film improvement on WC-Co substrate by sputtering interface
To enhance the adhesion of diamond film on WC-Co substrate, interface of TiC and SiC by sputtering technique were introduced between them. The film structure and surface morphology have been checked by x-ray diffraction, Raman spectroscopy and SEM. The adhesion between both coating and substrate have been evaluated by cutting test. In addition, the vertical tensile test has been carried out to measure the adhesion strength, which indicated that the introduce of the interface layer played important effect for improvement of the film adhesion strength.
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