MEMS，微系统和纳米系统

Proceedings of the 2002 7th IEEE International Workshop on Cellular Neural Networks and Their Applications Pub Date : 2002-07-22 DOI:10.1109/CNNA.2002.1035089

M. Zaghloul

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引用次数: 3

摘要

本文综述了近年来微加工技术及其在微机电系统和微系统中的应用。介绍了MEMS器件的示例，并讨论了它们在射频通信中的应用，以及新兴技术及其对未来器件和未来架构的影响。

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MEMS, microsystems and nanosystems

This paper reviews recent microfabrication techniques with applications to MEMS, and microsystems. Examples of MEMS devices are presented and their applications to RF-communications are discussed, along with new emerging technologies and their impact on future devices and future architectures.

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Proceedings of the 2002 7th IEEE International Workshop on Cellular Neural Networks and Their Applications

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