一种集成碳纳米管和石墨烯化学电阻器异质阵列的CMOS平台

Samuel MacNaughton, S. Sonkusale
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引用次数: 0

摘要

我们提出了一种“用于纳米组装的CMOS”方法,将碳纳米管和石墨烯组装在CMOS芯片上,用于气敏应用。碳纳米管和石墨烯已被证明是非常敏感的化学电阻器,适用于各种分析物。CMOS芯片的上层金属层包含60个平面和三维几何形状的电极。每个电极都可以通过片上电路寻址。电极通过后处理干蚀刻完全暴露。纳米级单壁碳纳米管(SWNTs)和还原氧化石墨烯(rGO)薄片的化学抗性组装通过控制介电电泳(DEP)组装到暴露的电极上,这是一种极化粒子在介电介质中的运动。该平台用于气体传感。据我们所知,这是第一次将功能石墨烯和碳纳米管传感器元件集成到单个CMOS芯片上。先前的结果表明,扩展芯片以包含其他化学阻性纳米材料是完全可行的。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A CMOS platform for the integration of heterogeneous arrays of carbon nanotubes and graphene chemiresistors
We propose a “CMOS for nanoassembly” method to assemble carbon nanotubes and graphene on CMOS chip for gas sensing application. CNT's and graphene have been demonstrated as extremely sensitive chemiresistors for a wide range of analytes. The upper metal layers of the CMOS chip contain sixty electrodes of both planar and three-dimensional geometries. Each electrode is addressable through on chip circuitry. The electrodes are fully exposed by post-process dry etching. Chemiresistive assemblies of nanoscale single wall carbon nanotubes (SWNTs) and reduced graphene oxide (rGO) flakes are assembled onto the exposed electrodes by controlled dielectrophoresis (DEP), which is the motion of a polarizable particle in a dielectric medium. The utility of the platform is shown for gas sensing. To the best of our knowledge, this is the first time functional graphene and carbon nanotubes sensor elements have been integrated onto a single CMOS chip. Previous results indicate that the expansion of the chip to include other chemiresistive nanomaterials is entirely feasible.
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